Federer made a good start to the match, breaking Cilic in the first game after the Croat failed to take advantage of two game points.
Cilic broke back in the fourth game of the first set, but the world number one responded immediately, restoring his advantage in the very next game. Federer also broke his opponent in the final game of the set to take it 6-3.
Cilic squandered three break points in the first game of the second set allowing Federer to get first blood.
The Swiss star then broke Cilic in the fourth game of the set, but the world number 13 responded with a break of his own.
Federer saw the match off with another break of serve, however, progressing into the semis with a 6-3 6-4 win.