The seventh seed fell behind to the conqueror of Andy Murray, but he appeared to benefit from having considerably less time on court at SW19 to run out a 7-6 4-6 7-6 7-5 winner.
As expected, serve dominated proceedings and a tie-break was required to decide the opener, which Querrey took by an 8-6 scoreline to move closer to his first ever Grand Slam final.
However, he could not maintain the kind of form which saw him defeat defending champion Murray, and one break of serve was enough for Cilic to leave the match.
The pair traded breaks in the third but it was Cilic who would come through the tie-break after claiming three points in a row, and it appeared that he had the momentum heading into the fourth.
Querrey went against that theory by striking during the early stages of that set, but Cilic powered back to claim two breaks of his own to earn a place in the final in two hours and 56 minutes.