Die Mannschaft took the lead in the 13th minute through Mats Hummels, and managed to hold on to their one-goal advantage for the remaining 77 minutes to secure their place in the last four of the tournament.
Deschamps told reporters: "I'm very proud of what my players have achieved in this tournament. They weren't that far short today, and we were up against a side that is used to playing these big games and has the experience to go with it.
"We just lacked that little bit you need to get the job done. This team is young and has a lot of quality in both footballing and mental terms. We need to build on those attributed ahead of our next big tournament."
Germany will face Brazil in their semi-final clash next week.