© Getty Images
In a fairly quiet opening half, the Portuguese side had the lion's share of possession but rarely threatened until the opening goal six minutes before the break.
The goal owed much to Toto Salvio as he skipped past a number of challenges before sliding the ball across goal for the forward to net his 14th strike of the campaign.
Roy Beerens had a decent opening for the visitors after the break but he could only snatch at his shot on the edge of the box on the hour mark.
With 20 minutes remaining, Benfica sealed the result via the same method as their first goal.
Salvio again was the architect and Rodrigo was on hand to convert his teammate's cross to put the tie beyond AZ.